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Edmund Optics Introduces Extreme Ultraviolet Flat Mirrors

Optical components provider Edmund Optics introduces extreme ultraviolet (EUV) flat mirrors. These precision polished, multi-layer mirrors are designed for maximum achievable reflectance at the design wavelength and angle of incidence (AOI). They are designed for EUV beam steering and harmonic separation applications.

Edmund Optics’ extreme ultraviolet (EUV) flat mirrors are available in 5° and 45° AOI versions and feature reflectivity at 13.5 nm, the wavelength of highest reflectivity available in the EUV spectrum. The RoHS-compliant mirrors offer a coating deposited on a super-polished single crystal silicon substrate for thermal stability. Exhibiting a surface roughness less than 3A RMS, these EUV mirrors greatly reduce scatter of incident light. The multi-layer, metal/semi-conductor coating includes a Mo/Si multilayer with a Si top layer. With a surface flatness of λ/10 at 632.8 nm and 6.35 mm thickness, the 45° AOI mirrors are suitable for steering s-polarized beams, while the 5° AOI mirrors are developed for use with unpolarized beams.

Designed for CDI and materials science research

Extreme ultraviolet (EUV) flat mirrors are used for emerging applications such as coherent diffractive imaging (CDI) and materials science research. CDI is a non-contact imaging technique, capable of achieving resolutions approaching 10 nm and is commonly used to analyze extremely small nanofabricated structures. The mirrors are also used as harmonic selectors for high harmonic generation (HHG) beams.

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