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49UL System from MKS

MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, today announced the release of its next generation Series 49UL Thermal Management System for Semiconductor, Analytic and Advanced markets.

The Series 49UL Thermal Management System with improved heater diagnostics capability and UL and CE safety certifications creates continuous heater monitoring and status, ensuring manufacturing process safety. With heater jackets made of high quality Polyimide or Polytetrafluoroethylene (PTFE), the S49UL provides high temperature operation and uniformity while being light weight and flexible for easy installation. The controller uses RS485 Modbus RTU communications protocol. It seamlessly interfaces with the MKS tablet app and supports communication with fab software and PCs, providing customers with data acquisition and diagnostics support for advanced heater control and heater monitoring. "Improving access to real-time heater data via our tablet interface saves fabs and manufacturing facilities time and improves worker safety", said David Seesdorf, General Manager of Integrated Process Solutions.

The Series 49UL product is available in a wide range of configurations with various diameter and shaped jackets, bend radii and power ratings to address a wide variety of applications. Find out more about the product here.

Labels: MKS Instruments,heater diagnostics,thermal,semiconductor,manufacturing

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