Opto Diode, a division of ITW, and a member of the ITW Photonics Group, introduces the ODD-SXUV-DLPSD, a duo-lateral ultraviolet (UV)/extreme ultraviolet (EUV) submicron-position resolution sensor. This new device provides a stable response after exposure to UV and/or EUV radiation. It is available in a TO-8 windowless package to minimise changes in the diode’s responsivity after exposure to intense UV/EUV photons. With a 5 millimetres (mm) × 5mm active area, the ODD-SXUV-DLPSD is suitable for applications in advanced lithography and any other positioning application requiring the use of a sub-200-nanometre (nm) wavelength.
The continuous position-sensing photodiode is designed for position detection of light from 1nm to 400nm wavelengths. The responsivity at 13nm is typically 0.20 amperes per watt (A/W); responsivity at 254nm is typically 0.02 A/W. Dark current, under operating conditions, is 10 (typical) and 50 (maximum) nano-amperes (nA). The new ODD-SXUV-DLPSD features reverse breakdown voltage of a minimum of 50 volts (V) and a capacitance of 40 (typical) to 60 (maximum) picofarads (pF).
Operating and storage temperatures range from -10°C to +40°C (+14°F to 104°F) ambient and from -20°C to +80°C (-4°F to +176°F) in nitrogen or vacuum conditions. The maximum junction temperature is 70°C (158°F) and the lead-soldering temperature is 260°C (500°F) at 0.080 inch from the case for 10 seconds.
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