Motion and precision positioning systems expert PI (Physik Instrumente) introduces a new compact metrology XY stage — the L-731. The magnetic linear direct drive is designed to provide high velocity and acceleration for inspection and microscopy.
With a travel range of 205 mm square and solid velocity to 100 mm/sec, the L-731 is equipped to deliver high accuracy and smooth motion. Precision crossed roller bearings with anti-creep cage assist enable superior guiding accuracy (1.5 µm straightness for loads up to 20 kg).
An integrated optical reference encoder and limit switch provide further positioning control and accuracy for this compact stage with 5 nm resolution. DC servo motor versions are available on request.
Standard or custom solutions
PI has in-house engineered solutions and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
Applications of the L-731
Fields of applications include automation, semiconductor applications, photonics, bio-nano-technology, metrology, microscopy, micro-manipulation, including cleanroom applications.
Features and advantages
- Travel Range 205 mm x 205 mm (8”)
- Sensor Resolution 5 nm
- Velocity to 100 mm/s
- Load Capacity to 20 kg
- Integrated Direct Drive Linear Motors and Linear Encoders
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