The PI Micos MCS XY precision linear stage is a two-axis positioning system that can handle loads up to 45 pounds (~20 kilograms) and provide resolution as high as 5 nanometres (nm) with a repeatability of 0.2 micrometres (µm). Its PIOne interferometric linear encoder makes this possible. A resolution of 1nm is feasible with reduced maximum speed. The XY stage was designed for industrial surface metrology and microscopy applications and combines robustness and accuracy.
Intended for use in fields such as optical inspection of precision machined parts, materials research and topographical measurements in semiconductor and flat-panel design, the stage’s straightness of motion and high dynamics are also important. A large clear aperture of 150x150 millimetres (mm) is beneficial in applications that transmit light.
The robust stage provides 102mm (~4 inches) of positioning range in both axes and achieves ±2µm straightness/flatness of motion. Angular precision is also good with a yaw of only ±20 microradians (µrad) and a pitch of ±40µrad. Driven by the compact SMC Hydra motion controller from PI Micos, MCS stages achieve velocity ranges from 1µm/second to 200mm/s (~8 inches/s).
The stage has several motor and position feedback options. For applications where closed-loop operation is not required, lower-cost open-loop stepper motors are offered. Several closed-loop versions are available for higher performance demands: stepper motors, DC servo motors and direct-drive electromagnetic noncontact linear motors.
The highest speed is available with the direct-drive linear motors. The company’s stepper motors and motion controllers can achieve smooth motion with constant velocity at the low end down to single digit microns/second. The MCS XY precision positioning stage can be combined with linear vertical stages, rotational stages and goniometric cradles, as well.
PI Micos specialises in vacuum-compatible positioning systems from 10-3 to 10-10 Torr. Basically, all of its linear and rotary stages can also be employed for vacuum use.
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