Nanopositioning specialist PI (Physik Instrumente), a solution provider in motion control and positioning components and systems, recently released the new A-311 PIglide IS series compact, planar air bearing stage, designed to deliver precise and vibration-free motion. Planar scanning stages are made for wafer inspection, laser marking, optical metrology and other precision motion applications.
Air bearings vs. mechanical bearings
Air bearings replace mechanical contact by a thin air film. The fully preloaded air bearings in the A-311 PIglide IS provide frictionless motion, resulting in negligible hysteresis or reversal error, and zero-wear of mechanical components. Due to the air bearing’s surface averaging effect, pitch/yaw/roll and straightness/flatness are significantly better than with conventional mechanical bearings, motion is vibration-free and velocity can be controlled at very high constancy.
Planar stages vs. stacked XY stages
The compact, single base plate design provides a lower profile compared to stacked XY stages, facilitating integration in tight spaces easy. In addition, error-causing bending moments introduced in stacked stages when the load on the top stage moves off-center are not an issue with planar stages. By eliminating the height and overhung loads of an XY stack design, the A-311 PIglide IS stage achieves 0.1 µm/inch straightness and flatness and roll/pitch/yaw errors of 1 to 2 arc-seconds.
Linear motors and encoders for high speed and acceleration
Smooth motion with no cogging or attractive forces is provided by ironless linear motors; position information down to 1nm resolution comes from integrated linear encoders. The linear motors reach velocities up to 1m/sec and acceleration to 1 g, a prerequisite for fast scanning and automation applications.
Applications of the cleanroom-compatible IS planar stage: Wafer inspection and scribing applications, microscopy, scanning.
Features and advantages:
- Low profile, high precision
- Optical linear encoders to 1 nanometer
- Travels up to 200mm x 200mm
- Load to 15kg max
- Velocity to 1m/sec, Acceleration to 1g.
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