
Aixtron SE today announced that EpiGaN, a new customer and a start-up manufacturer of III-Nitrides epitaxial material in Hasselt, Belgium, has successfully commissioned two new metal-organic chemical-vapour-deposition (MOCVD) systems, able to operate either in multiple 6-inch or 8-inch configurations.
EpiGaN, a spin-off of world-renowned Imec, which is a laboratory for advanced research in microelectronics, will use the systems to commercialise 6-inch gallium-nitride-on-silicon (GaN-on-Si) wafers for a range of power and radio-frequency (RF) electronics devices, as well as to develop the next generation of 200 millimetre (mm) GaN-on-Si wafers.
The reactors were installed and commissioned by Aixtron Europe’s service support team at the company’s facility located in Research Campus Hasselt, Belgium.